@misc{indiciaedebd65eca0ed,
  title = {Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding \$10\textasciicircum{}8\$},
  author = {Mingyun Yuan and Martijn A. Cohen and Gary Steele},
  year = {2016},
  doi = {10.1063/1.4938747},
  url = {https://arxiv.org/abs/1510.07468},
  note = {Source identifier: 1510.07468}
}