TY  - RPRT
TI  - Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding $10^8$
AU  - Mingyun Yuan
AU  - Martijn A. Cohen
AU  - Gary Steele
PY  - 2016
DO  - 10.1063/1.4938747
UR  - https://arxiv.org/abs/1510.07468
ID  - 1510.07468
ER  -