@misc{indiciaebaefcd687e6b,
  title = {Stability analysis of semiconductor manufacturing process with EWMA run-to-run controllers},
  author = {Bing Ai and David Shan-Hill Wong and Shi-Shang Jang},
  year = {2015},
  url = {https://arxiv.org/abs/1510.08946},
  note = {Source identifier: 1510.08946}
}