@misc{indiciaed33052a81549,
  title = {Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics},
  author = {Christoph Reinhardt and Tina Müller and Alexandre Bourassa and Jack C. Sankey},
  year = {2017},
  doi = {10.1103/physrevx.6.021001},
  url = {https://arxiv.org/abs/1511.01769},
  note = {Source identifier: 1511.01769}
}