TY  - RPRT
TI  - Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
AU  - Christoph Reinhardt
AU  - Tina Müller
AU  - Alexandre Bourassa
AU  - Jack C. Sankey
PY  - 2017
DO  - 10.1103/physrevx.6.021001
UR  - https://arxiv.org/abs/1511.01769
ID  - 1511.01769
ER  -