@misc{indiciaee70e9bd8b6ab,
  title = {Apparatus and method for plasma processing of SRF cavities},
  author = {J. Upadhyay and Do Im and J. Peshl and M. Bašović and S. Popović and A. -M. Valente-Feliciano and L. Phillips and L. Vuškovića},
  year = {2015},
  doi = {10.1016/j.nima.2016.02.049},
  url = {https://arxiv.org/abs/1511.04464},
  note = {Source identifier: 1511.04464}
}