@misc{indiciaeae7dee7b0496,
  title = {Photonic Damascene Process for Integrated High-Q Microresonator Based Nonlinear Photonics},
  author = {Martin H. P. Pfeiffer and Arne Kordts and Victor Brasch and Michael Zervas and Michael Geiselmann and John D. Jost and Tobias J. Kippenberg},
  year = {2015},
  doi = {10.1364/optica.3.000020},
  url = {https://arxiv.org/abs/1511.05716},
  note = {Source identifier: 1511.05716}
}