TY  - RPRT
TI  - Photonic Damascene Process for Integrated High-Q Microresonator Based Nonlinear Photonics
AU  - Martin H. P. Pfeiffer
AU  - Arne Kordts
AU  - Victor Brasch
AU  - Michael Zervas
AU  - Michael Geiselmann
AU  - John D. Jost
AU  - Tobias J. Kippenberg
PY  - 2015
DO  - 10.1364/optica.3.000020
UR  - https://arxiv.org/abs/1511.05716
ID  - 1511.05716
ER  -