@misc{indiciae8662a561f79b, title = {High-precision spectral tuning of micro and nanophotonic cavities by resonantly enhanced photoelectrochemical etching}, author = {Eduardo Gil-Santos and Christophe Baker and Aristide Lemaitre and Carmen Gomez and Sara Ducci and Giuseppe Leo and Ivan Favero}, year = {2015}, doi = {10.1038/ncomms14267}, url = {https://arxiv.org/abs/1511.06186}, note = {Source identifier: 1511.06186} }