TY - RPRT TI - High-precision spectral tuning of micro and nanophotonic cavities by resonantly enhanced photoelectrochemical etching AU - Eduardo Gil-Santos AU - Christophe Baker AU - Aristide Lemaitre AU - Carmen Gomez AU - Sara Ducci AU - Giuseppe Leo AU - Ivan Favero PY - 2015 DO - 10.1038/ncomms14267 UR - https://arxiv.org/abs/1511.06186 ID - 1511.06186 ER -