@misc{indiciae0c6b0df3ca99,
  title = {Electron-beam-ignited, high-frequency-driven vacuum ultraviolet excimer light source},
  author = {T. Dandl and H. Hagn and T. Heindl and R. Krücken and J. Wieser and A. Ulrich},
  year = {2015},
  doi = {10.1209/0295-5075/94/53001},
  url = {https://arxiv.org/abs/1511.08395},
  note = {Source identifier: 1511.08395}
}