TY - RPRT TI - High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors AU - Matthias Imboden AU - Jackson Chang AU - Corey Pollock AU - Evan Lowell AU - Mehmet Akbulut AU - Jessica Morrison AU - Thomas Stark AU - Thomas G. Bifano AU - David J. Bishop PY - 2016 DO - 10.1109/mcs.2016.2584338 UR - https://arxiv.org/abs/1512.05297 ID - 1512.05297 ER -