@misc{indiciae21b91645d6cd,
  title = {Controlled thinning and surface smoothening of silicon nanopillars},
  author = {S Kalem and P Werner and B Nilsson and V G Talalaev and M Hagberg and O Arthursson and U Sodervall},
  year = {2015},
  doi = {10.1088/0957-4484/20/44/445303},
  url = {https://arxiv.org/abs/1512.07996},
  note = {Source identifier: 1512.07996}
}