TY  - RPRT
TI  - Controlled thinning and surface smoothening of silicon nanopillars
AU  - S Kalem
AU  - P Werner
AU  - B Nilsson
AU  - V G Talalaev
AU  - M Hagberg
AU  - O Arthursson
AU  - U Sodervall
PY  - 2015
DO  - 10.1088/0957-4484/20/44/445303
UR  - https://arxiv.org/abs/1512.07996
ID  - 1512.07996
ER  -