TY  - RPRT
TI  - Fine-tuning the etch depth profile via dynamic shielding of ion beam
AU  - Lixiang Wu
AU  - Keqiang Qiu
AU  - Shaojun Fu
PY  - 2015
DO  - 10.1016/j.nimb.2016.05.021
UR  - https://arxiv.org/abs/1512.09237
ID  - 1512.09237
ER  -