@misc{indiciaea141d9b6a900,
  title = {Structured Back Gates for High-Mobility Two-Dimensional Electron Systems Using Oxygen Ion Implantation},
  author = {Matthias Berl and Lars Tiemann and Werner Dietsche and Helmut Karl and Werner Wegscheider},
  year = {2016},
  doi = {10.1063/1.4945090},
  url = {https://arxiv.org/abs/1601.01889},
  note = {Source identifier: 1601.01889}
}