@misc{indiciaeb17b4a6d3d2b,
  title = {Spatial Metrology of Dopants in Silicon with Exact Lattice Site Precision},
  author = {Muhammad Usman and Juanita Bocquel and Joe Salfi and Benoit Voisin and Archana Tankasala and Rajib Rahman and Michelle Y. Simmons and Sven Rogge and Lloyd L. C. Hollenberg},
  year = {2016},
  doi = {10.1038/nnano.2016.83},
  url = {https://arxiv.org/abs/1601.02326},
  note = {Source identifier: 1601.02326}
}