@misc{indiciaec57a5b214e0d,
  title = {Microfabrication of large area high-stress silicon nitride membranes for optomechanical devices},
  author = {E. Serra and M. Bawaj and A. Borrielli and G. Di Giuseppe and S. Forte and N. Kralj and N. Malossi and L. Marconi and F. Marin and F. Marino and B. Morana and R. Natali and G. Pandraud and A. Pontin and G. A. Prodi and M. Rossi and P. M. Sarro and D. Vitali and M. Bonaldi},
  year = {2015},
  doi = {10.1063/1.4953805},
  url = {https://arxiv.org/abs/1601.02669},
  note = {Source identifier: 1601.02669}
}