@misc{indiciae26b31aaba103, title = {Microfabrication technology for large LEKID arrays : from NIKA2 to future applications}, author = {J. Goupy and A. Adane and A. Benoit and O. Bourrion and M. Calvo and A. Catalano and G. Coiffard and C. Hoarau and S. Leclercq and H. Le Sueur and J. Macias-Perez and A. Monfardini and I. Peck and K. Schuster}, year = {2016}, doi = {10.1007/s10909-016-1531-y}, url = {https://arxiv.org/abs/1601.03969}, note = {Source identifier: 1601.03969} }