@misc{indiciae53a96928b77f,
  title = {Superconducting cavity-electromechanics on silicon-on-insulator},
  author = {Paul B. Dieterle and Mahmoud Kalaee and Johannes Fink and Oskar Painter},
  year = {2016},
  url = {https://arxiv.org/abs/1601.04019},
  note = {Source identifier: 1601.04019}
}