TY  - RPRT
TI  - Superconducting cavity-electromechanics on silicon-on-insulator
AU  - Paul B. Dieterle
AU  - Mahmoud Kalaee
AU  - Johannes Fink
AU  - Oskar Painter
PY  - 2016
UR  - https://arxiv.org/abs/1601.04019
ID  - 1601.04019
ER  -