@misc{indiciaee93d3ea3c107,
  title = {On the Origins of Near-Surface Stresses in Silicon around Cu-filled and CNT-filled Through Silicon Vias},
  author = {Ye Zhu and Kaushik Ghosh and Hong Yu Li and Yiheng Lin and Chuan Seng Tan and Guangrui Xia},
  year = {2016},
  doi = {10.1088/0268-1242/31/5/055008},
  url = {https://arxiv.org/abs/1601.04107},
  note = {Source identifier: 1601.04107}
}