TY  - RPRT
TI  - On the Origins of Near-Surface Stresses in Silicon around Cu-filled and CNT-filled Through Silicon Vias
AU  - Ye Zhu
AU  - Kaushik Ghosh
AU  - Hong Yu Li
AU  - Yiheng Lin
AU  - Chuan Seng Tan
AU  - Guangrui Xia
PY  - 2016
DO  - 10.1088/0268-1242/31/5/055008
UR  - https://arxiv.org/abs/1601.04107
ID  - 1601.04107
ER  -