@misc{indiciaec4ecdc2fe4db,
  title = {Lower limits of line resistance in nanocrystalline Back End of Line Cu interconnects},
  author = {Ganesh Hegde and R. Chris Bowen and Mark S. Rodder},
  year = {2016},
  doi = {10.1063/1.4967196},
  url = {https://arxiv.org/abs/1601.06675},
  note = {Source identifier: 1601.06675}
}