@misc{indiciaef5bc75030ef6,
  title = {High density NV sensing surface created via He\textasciicircum{}(+) ion implantation of (12)\textasciicircum{}C diamond},
  author = {Ed E. Kleinsasser and Matthew M. Stanfield and Jannel K. Q. Banks and Zhouyang Zhu and Wen-Di Li and Victor M. Acosta and Hideyuki Watanabe and Kohei M. Itoh and Kai-Mei C. Fu},
  year = {2016},
  doi = {10.1063/1.4949357},
  url = {https://arxiv.org/abs/1602.01534},
  note = {Source identifier: 1602.01534}
}