@misc{indiciae0c33b4cbd2a9,
  title = {Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring},
  author = {E. Schuengel and Z. Donko and P. Hartmann and A. Derzsi and I. Korolov and J. Schulze},
  year = {2016},
  url = {https://arxiv.org/abs/1602.02624},
  note = {Source identifier: 1602.02624}
}