TY  - RPRT
TI  - Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
AU  - E. Schuengel
AU  - Z. Donko
AU  - P. Hartmann
AU  - A. Derzsi
AU  - I. Korolov
AU  - J. Schulze
PY  - 2016
UR  - https://arxiv.org/abs/1602.02624
ID  - 1602.02624
ER  -