TY  - RPRT
TI  - On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges
AU  - Edmund Schuengel
AU  - Steven Brandt
AU  - Ihor Korolov
AU  - Aranka Derzsi
AU  - Zoltan Donko
AU  - Julian Schulze
PY  - 2016
UR  - https://arxiv.org/abs/1602.03482
ID  - 1602.03482
ER  -