TY  - RPRT
TI  - Electron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas
AU  - E. Schuengel
AU  - S. Brandt
AU  - Z. Donko
AU  - I. Korolov
AU  - A. Derzsi
AU  - J. Schulze
PY  - 2016
UR  - https://arxiv.org/abs/1602.03853
ID  - 1602.03853
ER  -