@misc{indiciaeb98f7d160dea,
  title = {Nanopatterning process based on epitaxial masking for the fabrication of electronic and spintronic devices made of La0.67Sr0.33MnO3/LaAlO3/SrTiO3 heterostructures with in situ interfaces},
  author = {Francesca Telesio and Luca Pellegrino and Ilaria Pallecchi and Daniele Marré and Emanuela Esposito and Emiliano di Gennaro and Amit Khare and Fabio Miletto Granozio},
  year = {2016},
  doi = {10.1116/1.4938484},
  url = {https://arxiv.org/abs/1602.04108},
  note = {Source identifier: 1602.04108}
}