@misc{indiciae0c4a176dce6a,
  title = {Eigenanalysis of morphological diversity in silicon random nanostructures formed via resist collapse},
  author = {Makoto Naruse and Morihisa Hoga and Yasuyuki Ohyagi and Shumpei Nishio and Naoya Tate and Naoki Yoshida and Tsutomu Matsumoto},
  year = {2016},
  doi = {10.1016/j.physa.2016.06.140},
  url = {https://arxiv.org/abs/1602.08205},
  note = {Source identifier: 1602.08205}
}