TY  - RPRT
TI  - Eigenanalysis of morphological diversity in silicon random nanostructures formed via resist collapse
AU  - Makoto Naruse
AU  - Morihisa Hoga
AU  - Yasuyuki Ohyagi
AU  - Shumpei Nishio
AU  - Naoya Tate
AU  - Naoki Yoshida
AU  - Tsutomu Matsumoto
PY  - 2016
DO  - 10.1016/j.physa.2016.06.140
UR  - https://arxiv.org/abs/1602.08205
ID  - 1602.08205
ER  -