@misc{indiciae7a87ee20f818,
  title = {Conformal Titanium Nitride in a Porous Silicon Matrix: a Nanomaterial for In-Chip Supercapacitors},
  author = {Kestutis Grigoras and Jari Keskinen and Leif Grönberg and Elina Yli-Rantala and Sampo Laakso and Hannu Välimäki and Pertti Kauranen and Jouni Ahopelto and Mika Prunnila},
  year = {2016},
  doi = {10.1016/j.nanoen.2016.04.029},
  url = {https://arxiv.org/abs/1603.00798},
  note = {Source identifier: 1603.00798}
}