TY  - RPRT
TI  - Dissipation engineering of high-stress silicon nitride nanobeams
AU  - A. H. Ghadimi
AU  - D. J. Wilson
AU  - T. J. Kippenberg
PY  - 2016
UR  - https://arxiv.org/abs/1603.01605
ID  - 1603.01605
ER  -