@misc{indiciaeadbbb6c203c6,
  title = {Extent of hydrogen coverage of Si(001) under chemical vapor deposition conditions from ab initio approaches},
  author = {Phil Rosenow and Ralf Tonner},
  year = {2016},
  doi = {10.1063/1.4952603},
  url = {https://arxiv.org/abs/1603.02918},
  note = {Source identifier: 1603.02918}
}