@misc{indiciaeb9a38f58a4af,
  title = {Faraday cage angled-etching of nanostructures in bulk dielectrics},
  author = {Pawel Latawiec and Michael J. Burek and Young-Ik Sohn and Marko Lončar},
  year = {2016},
  doi = {10.1116/1.4944854},
  url = {https://arxiv.org/abs/1603.03735},
  note = {Source identifier: 1603.03735}
}