TY  - RPRT
TI  - Faraday cage angled-etching of nanostructures in bulk dielectrics
AU  - Pawel Latawiec
AU  - Michael J. Burek
AU  - Young-Ik Sohn
AU  - Marko Lončar
PY  - 2016
DO  - 10.1116/1.4944854
UR  - https://arxiv.org/abs/1603.03735
ID  - 1603.03735
ER  -