@misc{indiciaea22dd7d702cd,
  title = {Infrared dielectric properties of low-stress silicon oxide},
  author = {Giuseppe Cataldo and Edward J. Wollack and Ari D. Brown and Kevin H. Miller},
  year = {2016},
  doi = {10.1364/ol.41.001364},
  url = {https://arxiv.org/abs/1603.04815},
  note = {Source identifier: 1603.04815}
}