TY  - RPRT
TI  - Infrared dielectric properties of low-stress silicon oxide
AU  - Giuseppe Cataldo
AU  - Edward J. Wollack
AU  - Ari D. Brown
AU  - Kevin H. Miller
PY  - 2016
DO  - 10.1364/ol.41.001364
UR  - https://arxiv.org/abs/1603.04815
ID  - 1603.04815
ER  -