@misc{indiciaeffefc5c61061,
  title = {Integrating MEMS and ICs},
  author = {Andreas C. Fischer and Fredrik Forsberg and Martin Lapisa and Simon J. Bleiker and Goran Stemme and Niclas Roxhed and Frank Niklaus},
  year = {2016},
  doi = {10.1038/micronano.2015.5},
  url = {https://arxiv.org/abs/1604.04843},
  note = {Source identifier: 1604.04843}
}