@misc{indiciaeddfecbaaebcd, title = {Fabrication of FeSi and Fe3Si compounds by electron beam induced mixing of [Fe/Si]2 and [Fe3/Si]2 multilayers grown by focused electron beam induced deposition}, author = {F. Porrati and R. Sachser and G. C. Gazzadi and S. Frabboni and M. Huth}, year = {2016}, doi = {10.1063/1.4954067}, url = {https://arxiv.org/abs/1604.05536}, note = {Source identifier: 1604.05536} }