@misc{indiciae370e5dc6afb1, title = {Integrated micro-plasmas in silicon operating in helium}, author = {Remi Dussart and Lawrence J. Overzet and P Lefaucheux and Thierry Dufour and M Kulsreshath and Monali Mandra and Thomas Tillocher and O Aubry and S Dozias and P Ranson and M Goeckner}, year = {2016}, doi = {10.1140/epjd/e2010-00272-7}, url = {https://arxiv.org/abs/1604.08821}, note = {Source identifier: 1604.08821} }