@misc{indiciae72d8c88b4d38,
  title = {Round Robin: Quantitative Lateral Resolution of PHI XPS microprobes Quantum 2000 / Quantera SXM},
  author = {U. Scheithauer and M. Kolb and G. A. M. Kip and E. Naburgh and J. H. M. Snijders},
  year = {2016},
  doi = {10.1016/j.elspec.2016.04.007},
  url = {https://arxiv.org/abs/1605.02692},
  note = {Source identifier: 1605.02692}
}