@misc{indiciaed9b47fa4472d,
  title = {Suspending superconducting qubits by silicon micromachining},
  author = {Y. Chu and C. Axline and C. Wang and T. Brecht and Y. Y. Gao and L. Frunzio and R. J. Schoelkopf},
  year = {2016},
  doi = {10.1063/1.4962327},
  url = {https://arxiv.org/abs/1606.02822},
  note = {Source identifier: 1606.02822}
}