@misc{indiciaeff04d0bc003b,
  title = {SANTA: Self-Aligned Nanotrench Ablation via Joule Heating for Probing Sub-20 nm Devices},
  author = {Feng Xiong and Sanchit Deshmukh and Sungduk Hong and Yuan Dai and Ashkan Behnam and Feifei Lian and Eric Pop},
  year = {2016},
  url = {https://arxiv.org/abs/1606.05052},
  note = {Source identifier: 1606.05052}
}