TY  - RPRT
TI  - SANTA: Self-Aligned Nanotrench Ablation via Joule Heating for Probing Sub-20 nm Devices
AU  - Feng Xiong
AU  - Sanchit Deshmukh
AU  - Sungduk Hong
AU  - Yuan Dai
AU  - Ashkan Behnam
AU  - Feifei Lian
AU  - Eric Pop
PY  - 2016
UR  - https://arxiv.org/abs/1606.05052
ID  - 1606.05052
ER  -