@misc{indiciaee0a3b399410b,
  title = {Interference-aided spectrum fitting method for accurately film thickness determination},
  author = {Xingxing Liu and Shao-Wei Wang and Hui Xia and Xutao Zhang and Ruonan Ji and Tianxin Li and Wei Lu},
  year = {2016},
  url = {https://arxiv.org/abs/1606.05402},
  note = {Source identifier: 1606.05402}
}