TY  - RPRT
TI  - Interference-aided spectrum fitting method for accurately film thickness determination
AU  - Xingxing Liu
AU  - Shao-Wei Wang
AU  - Hui Xia
AU  - Xutao Zhang
AU  - Ruonan Ji
AU  - Tianxin Li
AU  - Wei Lu
PY  - 2016
UR  - https://arxiv.org/abs/1606.05402
ID  - 1606.05402
ER  -