@misc{indiciae2466d4215dcc, title = {Hafnium carbide formation in oxygen deficient hafnium oxide thin films}, author = {C. Rodenbücher and E. Hildebrandt and K. Szot and S. U. Sharath and J. Kurian and P. Komissinskiy and U. Breuer and R. Waser and L. Alff}, year = {2016}, doi = {10.1063/1.4954714}, url = {https://arxiv.org/abs/1606.08227}, note = {Source identifier: 1606.08227} }