@misc{indiciae3a9e19dcfa71,
  title = {Infrared vertically-illuminated photodiode for chip alignment feedback},
  author = {Luca Alloatti and Rajeev Jagga Ram},
  year = {2016},
  doi = {10.1063/1.4961949},
  url = {https://arxiv.org/abs/1606.08870},
  note = {Source identifier: 1606.08870}
}